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近年来利用氦氖激光基本物理特性的激光干涉技术具有越来越重要的意义。稳定的氦氖激光器是一种很适合干涉测量的新光源。激光干涉仪的特性、功能和在恶劣工作环境下的稳定性不同于带有平面镜的古典的迈克尔逊干
In recent years, the use of He-Ne laser basic physical properties of laser interferometry technology has more and more significance. A stable HeNe laser is a new light source that is well suited for interferometry. Laser interferometer features, functions and stability in harsh working environments Unlike the classical Michelson dry mirror