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本文叙述了测量离子能量低至10电子伏的圆柱形静电分析器的结构和实验结果。实验结果表明,该分析器在10—250电子伏的能量区域内,氢离子能量Ei和分析器偏转电压保持良好的线性关系。它的能量分辨率约为2.3%。
This article describes the structure and experimental results of a cylindrical electrostatic analyzer that measures ion energies down to 10 eV. The experimental results show that the analyzer maintains a good linear relationship between the energy of hydrogen ion Ei and the analyzer deflection voltage in the energy region of 10-250 eV. Its energy resolution is about 2.3%.