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随机电报信号(RTS)噪声是表征短沟道器件可靠性的重要敏感参数,能敏感地反映MOS器件中的边界陷阱,为探测小尺寸器件中的缺陷提供了有效的手段。为了能够准确测量出RTS,采用了无噪声偏置电路,设计了两级抑噪电路。在两通道三个运算放大器的基础上,设计了RTS噪声测量放大器,提出一种改进的变步长LMS数字滤波器算法,构造了步长函数和误差的相关值之间的非线性表达式。实验结果表明,在较小的RTS时间常数下,相同精度时,参量提取的误差比传统方法减小20%,同时新算法具有更快的收敛速度,良好的稳态误差性。
Random signal (RTS) noise is an important sensitive parameter to characterize the reliability of short-channel devices. It can reflect the boundary traps sensitively in MOS devices and provides an effective means for detecting defects in small-size devices. In order to be able to accurately measure the RTS, using a noise-free bias circuit, designed a two-stage noise suppression circuit. Based on the two channels of three operational amplifiers, an RTS noise measurement amplifier is designed and an improved variable step size LMS digital filter algorithm is proposed. The nonlinear expression between the step function and the error correlation value is constructed. The experimental results show that the error of parameter extraction is reduced by 20% compared with the traditional method at the same precision with a small RTS time constant. Meanwhile, the new algorithm has faster convergence rate and better steady-state error.