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美国国家氩实验室领导小组推荐一种用新的激光法测定材料表面杂质,比SIMS的灵敏度大大地改进,能量高,可以反向散射,是目前世界上最准确的方法,称为喷溅原子共振离子化仪(resonance ionization of sputtered atoms-SARISA)。它包括2个脉冲激光器,脉冲离子束,一个超高真空室,一个脉冲测定器,一个俄歇能谱仪(试样检查用)(Auger spectrometer)及一些电子装置。所用的激光是Nd:YAG有色激光(钔:钇铝石榴石)用一个原子增益的电子传递器来调节频率共振。用一个XeCl(氯化氙)准分子激光器供给更多的能,足以使电子跑掉而形成离子。别的试样的喷溅原子——
National Argonne Laboratory leading group recommended a new laser method to determine the surface of the material impurities, greatly improved the sensitivity than SIMS, high energy, backscatter, is the world’s most accurate method, known as splash atom Resonance ionization of sputtered atoms-SARISA. It consists of two pulsed lasers, a pulsed ion beam, an ultra-high vacuum chamber, a pulse oximeter, an Auger spectrometer, and some electronics. The laser used is a Nd: YAG colored laser (钔: Yttrium Aluminum Garnet) that uses an atomic gain electron transmitter to adjust the frequency resonance. An XeCl (xenon chloride) excimer laser supplies more energy, enough to get the electrons off to form ions. Other sample splatter atoms -