Full-IC manufacturability check based on dense silicon imaging

来源 :中国科学F辑(英文版) | 被引量 : 0次 | 上传用户:lullm
下载到本地 , 更方便阅读
声明 : 本文档内容版权归属内容提供方 , 如果您对本文有版权争议 , 可与客服联系进行内容授权或下架
论文部分内容阅读
With the increased design complexities brought in by applying different Reticle Enhancement Technologies (RETs) in nanometer-scale IC manufacturing process, post-RET sign-off verification is quickly becoming necessary. By introducing innovative algorithms for lithographic modeling, silicon imaging and yield problem locating,this paper describes a new methodology of IC manufacturability verification based on Dense Silicon Imaging (DSI). Necessity of imaging based verification is analyzed.Existing post-RET verification methods are reviewed and compared to the new methodology. Due to the greatly improved computational efficiency produced by algorithms such as the ~16*log2N/Iog2M times faster Specialized FFT, DSI based manufacturability checks on full IC scale, which were impractical for applications before,are now realized. Real verification example has been demonstrated and studied as well.
其他文献
1976年朱德病逝后.每个清明节,康克清都要带领儿孙到八宝山去祭扫.即使在外地.她也要按时赶回来。1992年的清明节.病重的康克清更加思念自己的亲密战友和伴侣朱德.可是.她实在没法去
笔者曾长期在著名烈士方志敏的家乡江西弋阳县从事编史修志工作。当年曾与方志敏一起出生入死的战友及他麾下的幸存者,在新中国成立后有不少成为各部门的领导干部,自然成为弋
黄岩(1912-1989),原名黄家银,安徽六安人。1931加入中国共产党,后任中共霍邱县城关区委书记并参加县委,随红军坚守县城,城陷被捕,1937年8月获释。不久去延安中央党校学习。次
民国中将张克侠有“佩剑将军”之誉。剑,向来为军人所爱。他拥有的这把剑,名为“中正剑”。此剑是蒋介石为了拉拢、培植死党为其卖命,特地在德国制作,用以激赏部下的。此剑身
1971年9月13日,中国发生了一件震惊世界的大事——林彪出逃,途中机毁人亡。其实毛泽东与林彪的分歧,在这之前已逐渐显现出来。在国际方面,善于揣摩毛泽东心思的林彪也没有号
最近,香港食物及卫生局局长对媒体表示:“大陆供港食品的安全率达到了99.999%。”另据此前澳门公布的数据,内地供澳食品合格率达100%。看到这一组数据,笔者为港澳同胞感到高兴,但也会
This paper proposes to use Fast Fourier Transform (FFT)/Inverse Fast Fourier Transform (IFFT), instead of vector-matrix multiplication, to implement the spreadi
Acoustic Doppler current profiler (ADCP) uses acoustic energy directed along narrow beams for current measurement. In conventional method, the quantity of sampl
A speed control analysis for an in-line gasoline fueled internal combustion (IC) engine is presented for the purpose of alleviation of high frequency oscillatio
Energy regeneration during braking is an important technique for hybrid electric vehicle (HEV) to improve their fuel economy and extend their driving range. Due