论文部分内容阅读
用低能氩离子束(Ar+)处理了多孔铝阳极氧化膜(AAO)表面.扫描电子显微镜和原子力显微镜结果表明,Ar+束刻蚀不仅可以有效地去除AAO反面阻挡层,还可使AAO表面产生多种特殊的形貌,如采用倾角入射可使其表面产生波纹,倾角入射同时旋转样品台,可实现表面抛光.并结合Bradley和Harper提出的无定形材料表面波纹的形成和演化理论解释了AAO表面波纹的特征.
The surface of porous aluminum anodic oxide film (AAO) was treated by low energy argon ion beam (Ar +). The results of scanning electron microscopy and atomic force microscopy show that Ar + beam etching can not only effectively remove the AAO back barrier, but also produce more AAO A special morphology, such as the use of inclinations can make the surface of its ripples, incline angle while rotating the sample stage, surface polishing can be achieved.And Bradley and Harper proposed amorphous material surface ripples formation and evolution theory to explain the AAO surface Corrugated features.