在直流电弧等离子体喷射CVD法制备金刚石膜中,电弧可分为弧心、弧干、弧边三个区域。本文主要阐述了电弧的分区特征,讨论电弧区域特征对金刚石形核的影响。同时,以电弧分区特征为基础,探讨了预处理方式和温度对金刚石形核的关联影响。结果表明:形核初期对应于TiC粉的Raman谱,衬底的钛过渡层表面形成了TiC的过渡层,弧心区域金刚石形核迅速,形核密度较高,而在弧边区域金刚石形核缓慢,形核密度相对较低。 In the DC arc plasma jet CVD method for the preparation of diamond films, the arc can be divided into arc center, arc dry, arc three areas. This paper mainly describes the zoning characteristics of the arc and discusses the influence of the regional characteristics of the arc on the diamond nucleation. At the same time, the relationship between pretreatment method and temperature on diamond nucleation was discussed based on the characteristics of arc zone. The results show that the initial stage of nucleation corresponds to the Raman spectrum of TiC powder, the transition layer of TiC is formed on the surface of titanium transitional layer. The diamond nuclei in arc center area are rapid and the nucleation density is high. Slow, nucleation density is relatively low.