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以草酸为电解液,分别用一次氧化法和二次氧化法制备了阳极氧化铝(AAO)模板。采用原子力显微镜和X射线衍射仪分别对其显微形貌和晶体结构进行表征。结果表明:一次氧化法制得的AAO模板正面孔洞排列有序性较差,而反面纳米花样排列较为规则;二次氧化法制得的模板孔洞排列很规则,且经扩孔腐蚀后,孔径变大,晶体结构由多晶态Al2O3转变为AlPO4;不同氧化电压下晶体结构存在差异。简要探讨了AAO模板形成机理。
Anodic aluminum oxide (AAO) templates were prepared by one-oxidation and two-oxidation methods with oxalic acid as the electrolyte. Atomic force microscope and X-ray diffractometer were used to characterize the microstructure and crystal structure. The results show that the frontal holes of AAO template prepared by the single oxidation process are poorly ordered, while the reverse nano-patterns are arranged more regularly. The template holes prepared by the secondary oxidation process are regular, and the hole diameter increases after the coring process, The crystal structure changes from polycrystalline Al2O3 to AlPO4. The crystal structure is different under different oxidation voltages. The formation mechanism of AAO template was briefly discussed.