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采用高频等离子化学气相沉积法（ＲＦＣＶＤ）在ＨｇＣｄＴｅ红外器件上沉积类金刚石薄膜。俄歇电子能谱对ＤＬＣ／ＨｇＣｄＴｅ界面分析结果表明类金刚石薄膜中的碳原子对衬底材料影响较小，７０ｎｍ的类金刚石薄膜能抑制衬底组份的外扩散，而且具有纯度较高的类金刚石薄膜外表面层，是一种理想的钝化膜材料。红外透射光谱测试结果表明类金刚石薄膜在较宽的波长范围内（４１２μｍ）具有明显的增透效应。
DLC films were deposited on HgCdTe infrared devices by high frequency plasma chemical vapor deposition (RFCVD). Auger electron spectroscopy DLC / HgCdTe interface analysis results show that diamond-like carbon in the diamond film has little effect on the substrate material, 70nm diamond-like carbon film can inhibit the diffusion of substrate components, and has a higher purity class Diamond film outer surface layer, is an ideal passivation film material. Infrared transmission spectroscopy test results show that diamond-like carbon films in a wide wavelength range (4 12μm) with significant anti-proliferation effect.