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研究了测试条件对 P S D 位置精度的影响,并通过实验给出了定性或定量的实验结果,为 P S D运用于高精度光斑定位技术创造了有利的条件。
The influence of the test conditions on the position accuracy of P S D is studied. The qualitative and quantitative experimental results are given through experiments, which creates favorable conditions for the P S D to be applied to the high-precision spot location technology.