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为了实现低温真空环境下红外材料热膨胀系数的高精度测量,提出了一种固体材料低温热膨胀系数的测量方案。本方案基于自准直原理,设计了一种测微结构,建立起了结构变形与角度的关系,并推导出热膨胀系数测量公式。利用测量公式,从理论上分析了该方案的测量误差传递函数关系,并利用误差灵敏度函数对红外材料低温热膨胀系数测量装置的设计精度进行了分析,最后通过计算得到了该方案的测量相对误差。结果表明,测量的热膨胀系数相对误差仅为0.76%,满足纳米级测量要求。
In order to measure the thermal expansion coefficient of infrared materials under low temperature and vacuum environment, a measurement scheme of low temperature thermal expansion coefficient of solid materials is proposed. Based on the self-collimation principle, this program designs a micrometric structure, establishes the relationship between structural deformation and angle, and deduces the measurement formula of thermal expansion coefficient. The measurement error transfer function is analyzed theoretically by using the measurement formula. The design accuracy of the device for measuring the low temperature thermal expansion coefficient of the infrared material is analyzed by using the error sensitivity function. Finally, the relative error of the measurement is obtained. The results show that the relative error of measured coefficient of thermal expansion is only 0.76%, which meets the requirement of nanometer scale measurement.