前言 近年来,随着科学技术的飞跃发展,真空镀膜技术不但广泛地应用于光学、电子、半导体以及原子能和空间技术等许多工业和科学领域中,而且在微电子学及太阳能利用方面,尤为人们所重视。 利用真空镀膜技术,一旦将膜材镀到任何形状和任何物质上去,就可以在这种物质表面上获得一 Preface In recent years, with the rapid development of science and technology, vacuum coating technology has been widely used in many industrial and scientific fields, such as optics, electronics, semiconductors and atomic energy and space technology. Especially in the field of microelectronics and solar energy utilization, people Attention. Using vacuum coating technology, once the film is plated to any shape and any material, it is possible to obtain a