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本文概述Spindt型阴极的发展水平及其应用,介绍了在我们现在有工艺条件下,研制Spindt型阴极的情况。利用改装的蒸发沉积设备及射频磁控溅射技术在基片上的微孔阵列中制作发射尖锥,以制成场发射阴极。在真空条件下测量了该阴极的发射特性,并利用这种平面阴极制作了荧光屏显示原理性样管显示出足够亮度的光点;在此基础上,对该阴极在平板显示器件上的应用提出了一个设计,对实现这一设计的材料和工艺作了论证.
This article summarizes the development and application of Spindt-type cathodes and describes the development of Spindt-type cathodes under our current process conditions. An emission cone was fabricated in a microwell array on a substrate using a modified evaporation deposition apparatus and radio frequency magnetron sputtering technique to make a field emission cathode. The emission characteristics of the cathode were measured under vacuum condition, and the flat cathode was used to fabricate a fluorescent screen to show that the principle sample tube showed a bright spot. On this basis, the application of the cathode to the flat panel display device was proposed A design was made to demonstrate the material and workmanship that enabled this design.