As the device size decreases, the soft error induced by space ions is becoming a great concern for the reliability of integrated circuits(ICs). At present, the body biasing technique is widely used in highly scaled technologies. In the paper, using the three-dimensional technology computer-aided design(TCAD) simulation, we analyze the effect of the body biasing on the single-event charge collection in deep N-well technology. Our simulation results show that the body biasing mainly affects the behavior of the source, and the effect of body biasing on the charge collection for the n MOSFET and p MOSFET is quite different. For the n MOSFET, the RBB will increase the charge collection, while the FBB will reduce the charge collection. For the p MOSFET, the effect of RBB on the SET pulse width is small, while the FBB has an adverse effect. Moreover, the differenceof the effect of body biasing on the charge collection is compared in deep N-well and twin well. As the device size decreases, the soft error induced by space ions is becoming a great concern for the reliability of integrated circuits (ICs). At present, the body biasing technique is widely used in highly scaled technologies. In the paper, using the three -dimensional technology computer-aided design (TCAD) simulation, we analyze the effect of the body biasing on the single-event charge collection in deep N-well technology. Our simulation results show that the body biasing mainly affects the behavior of the source, the effect of body biasing on the charge collection for the n MOSFET and the p MOSFET are quite different. For the n MOSFET, the RBB will increase the charge collection, while the FBB will reduce the charge collection. of RBB on the SET pulse width is small, while the FBB has an adverse effect. Moreover, the difference of the effect of body biasing on the charge collection is more in deep N-well and twin well.