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为了研究电子倍增电荷耦合器件(EMCCD)中电荷载流子倍增寄存器(CCM)内部电荷的倍增及转移特性,提出了一种适用于CCM的电荷传输机制仿真的分布式等效电路模型。利用泊松方程求解了均匀掺杂条件下CCM单元的电势分布,通过基尔霍夫电压定律(KVL)得到了该单元的最大电势表达式,从而得到了其分布式等效电路。同时,结合该单元内的电势分布求解,最终得到了分布式等效电路模型。通过对该模型的分析表明:CCM单元内电极间的间隙越小,电荷倍增率越大。CCM电荷传输主要受到自感生电场和热扩散电场作用,由于自感生电场的电荷迁移率作用,大部分电荷在时钟周期的初始阶段完成转移。
In order to study the multiplication and transfer characteristics of internal charge in charge carrier multiplication register (CCM) in electron multiplying charge-coupled device (EMCCD), a distributed equivalent circuit model for charge transfer mechanism of CCM is proposed. The Poisson equation is used to solve the potential distribution of CCM under uniform doping conditions. The maximum potential expression of this unit is obtained by Kirchhoff’s voltage law (KVL), and its distributed equivalent circuit is obtained. At the same time, with the solution of the potential distribution in the cell, a distributed equivalent circuit model is finally obtained. The analysis of the model shows that the smaller the gap between the electrodes in the CCM cell, the larger the charge multiplication rate. The charge transfer of CCM is mainly affected by the self-induced electric field and the thermal diffusion electric field. Due to the charge mobility of the self-induced electric field, most of the charges are transferred at the initial stage of the clock cycle.