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基于耦合模理论对一种应用于无线传感器的声表面波(SAW)反射型延迟线的性能进行了优化模拟分析。结合混合等效电路模型推导出评价这种器件性能的时域反射系数S_(11)。典型的SAW反射型延迟线包含置于压电基片之上的一个换能器与沿声波传播方向设置的多个反射器。讨论了器件性能的各种结构性影响因素如换能器结构以及反射器类型等,并以此获得优化的器件设计参数。在理论优化分析的基础上,以41°YX LiNbO_3为压电基片,结合铝电极试验制作了采用单向单相换能器(SPUDT)与3个短路栅反射器的440 MHz SAW反射型延迟线器件,并与理论分析结果予以对比与评价分析。
Based on the coupled-mode theory, the performance of a SAW reflective delay line applied to wireless sensor is simulated and optimized. Combined with the hybrid equivalent circuit model, the time domain reflection coefficient S_ (11) for evaluating the performance of this device is deduced. A typical SAW reflective delay line consists of a transducer placed above a piezoelectric substrate and multiple reflectors arranged in the direction of sound wave propagation. Various structural influences of the device performance, such as the structure of the transducer and the type of reflector, are discussed, and optimized device design parameters are obtained. Based on the theoretical optimization analysis, a 440 MHz SAW reflection delay with a single-phase single-phase transducer (SPUDT) and three short-circuit gate reflectors was fabricated using 41 ° YX LiNbO_3 as the piezoelectric substrate and aluminum electrode. Line device, and compared with the theoretical analysis of the results and evaluation analysis.