介绍在制备和检测软Ｘ光激光用多层膜反射镜中听做的研究工作。重点是制备过程，包括基板、镀膜设备、膜厚控制方法，以及经大量实验得出的镀膜工艺条件、给出了利用Ｘ光射线衍射仪所做的周期结构检测结果，以及利用激光等离子体作光源的精密反射率计所作的反射率测量结果。最后，对工作进展和存在的问题做了简略评述。 This paper introduces the research done in the preparation and testing of multilayer X-ray laser multilayer mirrors. The focus is on the preparation process, including the substrate, coating equipment, film thickness control method, and a large number of experiments obtained by the coating process conditions are given by the X-ray diffraction structure of the periodic test results and the use of laser plasma Reflectance measurements made by a precision reflectance light source. In the end, I made a brief comment on the progress and problems of the work.