设计了一种能量补偿多缝离子源质谱计。从离子源边缝引出的离子束相对于从中缝引出的束有一定的能量差。这样,边缝引出束在质谱计焦面上的象将和从中缝引出的同种离子束的象相重叠。设中缝引出束的能量为E_o,则从横向偏移为x_o的边缝引出束的能量差⊿E,在一级 An energy compensation multi-slit ion source mass spectrometer was designed. The ion beam drawn from the edge of the ion source has a certain energy difference with respect to the beam drawn from the middle slit. Thus, the image of the edge-splitting beam at the mass spectrometer focal plane will overlap with the image of the same type of ion beam emanating from the mid-slit. If the energy of the outgoing beam in the middle slot is E_o, then the energy difference ⊿E of the outgoing beam of the edge slot displaced from the horizontal direction by x_o is in the first level