论文部分内容阅读
本文叙述了用X射线衍射原理和技术,分析Cd-P二元系统化学反应中的物相情况,为半导体器件制作中扩散源材料磷化镉的化学合成提供了工艺资料。同时,对多晶半导体材料进行了分析鉴定。
This paper describes the use of X-ray diffraction principles and techniques to analyze the chemical phase of the Cd-P binary system, and provides technical data for the chemical synthesis of phosphide as a diffusion source in the fabrication of semiconductor devices. At the same time, polycrystalline semiconductor materials were analyzed and identified.