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Leybold推出真空系统的新产品RVVAC系统。该系统将半导体的刻蚀处理设备装在一个完整的机壳内,它特别适用于金属刻蚀、反应离子刻蚀、等离子辅助化学气相沉积(CVD)和低压化学气相沉积(LPCVD)等。
Leybold Launches New RVVAC System for Vacuum Systems. The system incorporates semiconductor etch processing equipment in a complete enclosure that is particularly suitable for metal etching, reactive ion etching, plasma assisted chemical vapor deposition (CVD) and low pressure chemical vapor deposition (LPCVD).