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针对飞秒激光微加工中能量利用率和加工效率低的问题,提出一种基于空间光调制器的飞秒并行加工方法。在讨论衍射光栅入射角与衍射角关系的基础上,分析了叠加多个衍射光栅产生多光束的原理,运用GS算法对目标多光束进行优化并计算出相应的相位全息图,将该全息图加载到空间光调制器中获得了多光束。采用脉宽100fs、波长800nm的飞秒激光,进行聚焦PMMA样品内部的并行加工实验,观察到PMMA上多点组合的“一”和“工”字型,得到了光束能量均匀的图形。实验结果论证了该方法对于多光束并行加工控制的有效性。
Aiming at the problem of low energy efficiency and processing efficiency in femtosecond laser micromachining, a femtosecond parallel processing method based on spatial light modulator is proposed. Based on the discussion of the relation between incident angle and diffraction angle of diffraction grating, the principle of superposition of multiple diffraction gratings to generate multi-beams is analyzed. By using GS algorithm to optimize the target multi-beam and calculate the corresponding phase hologram, the hologram is loaded Get multiple beams into a spatial light modulator. The parallel processing experiments of focused PMMA samples were carried out with 100fs pulse width and 800nm wavelength femtosecond laser. The multi-point combination of “1” and " Graphics. The experimental results demonstrate the effectiveness of this method for multi-beam parallel processing control.