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平板波导光谱仪是一种紧凑型光谱仪,其光栅多次衍射杂散光大,需要进行抑制。首先研究了多次衍射杂散光的形成过程,并通过Trace Pro软件详细分析了多次衍射杂散光的传播路径和大小。然后根据杂散光的空间特性和波长特性对其进行分类,采取不同的抑制方法。在不改变原有光学结构的基础上提出了利用滤光片和挡光板来抑制多次衍射杂散光的方法,滤光片的参数和位置需要精心选择以达到最好的抑制效果。最后对增加抑制结构前后的杂光系数进行对比分析。结果表明,多次衍射杂散光得到了很好的抑制,最大杂光系数从5.3%降到0.033%,平均杂光系数从1.9%降到0.001 8%。
Slab waveguide spectrometer is a compact spectrometer, the grating diffraction stray light many times, need to be suppressed. Firstly, the formation process of multiple diffraction stray light was studied, and the propagation path and size of multiple diffraction stray light were analyzed in detail by Trace Pro software. Then according to the spatial characteristics and wavelength characteristics of stray light to classify them, take different inhibition methods. On the basis of not changing the original optical structure, a method of using a filter and a light blocking plate to suppress stray light of multiple diffraction is proposed. The parameters and positions of the filter need to be carefully selected so as to achieve the best suppression effect. Finally, the increase of inhibitory structure before and after the stray light coefficient for comparative analysis. The results show that the multiple diffraction stray light is well suppressed, the maximum stray light coefficient is reduced from 5.3% to 0.033%, and the average stray light coefficient is reduced from 1.9% to 0.001 8%.