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采用射频等离子体增强化学气相沉积法(rf-PECVD),在45钢表面沉积了类金刚石(DLC)薄膜,借助激光拉曼光谱仪(Raman)、X射线光电子能谱(XPS)、扫描电子显微镜(SEM)和原子力显微镜(AFM),分析了DLC膜的键结构、表面形貌和结构特征,用原位纳米力学测试系统测定了薄膜的硬度。以GCr15钢为摩擦副材料,用UMT-Ⅱ摩擦磨损实验机考察了不同载荷和滑行速度条件下DLC膜的摩擦磨损性能,并分析了磨损机理。结果表明,在45钢表面沉积的薄膜具有典型的类金刚石薄膜的结构特征,薄膜表面由致密的纳米级颗粒组成,具有较高的硬度。在各种摩擦磨损实验条件下DLC薄膜表现出良好的抗磨损性能,摩擦系数均明显比45钢的低,尤其在高速低载下摩擦系数低至0.008。
The films of diamond-like carbon (DLC) were deposited on the surface of 45 steel by RF plasma enhanced chemical vapor deposition (rf-PECVD). Raman, XPS and SEM (scanning electron microscopy) SEM) and atomic force microscope (AFM). The bond structure, surface morphology and structural characteristics of DLC films were analyzed. The hardness of the films was measured by in-situ nanomechanical test system. The friction and wear properties of DLC film with GCr15 steel as friction material and UMT-Ⅱ friction and wear tester were investigated under different loads and gliding velocities, and the wear mechanism was analyzed. The results show that the film deposited on the surface of 45 steel has typical structural characteristics of diamond-like carbon films. The surface of the film is composed of dense nano-scale particles with high hardness. The DLC film exhibited good wear resistance under various friction and wear test conditions. The friction coefficient was significantly lower than that of 45 steel, especially at high speed and low load, the friction coefficient was as low as 0.008.