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根据光集成技术对脊形光波导的要求 ,通过系统的分析和优化设计得出了GexSi1 -x/Si脊形光波导的最佳结构参数。对波长为 1 .3μm的光波 ,其数值孔径在光波导的输入、输出端均和单模光纤的相匹配 ,其最佳Ge组分为 0 .0 3和 0 .0 4。符合大截面且和单模光纤芯径相当的脊高分别为 4～ 1 0 μm和 4.0～ 5 .9μm ,脊宽分别为 8.8～ 1 0 .0 μm和 5 .9～ 1 0 .0 μm。
According to the requirements of the optical integrated technology for the ridge optical waveguide, the optimum structural parameters of the GexSi1-x / Si ridge optical waveguide are obtained through systematic analysis and optimization design. The wavelength of 1 .3μm light wave, the numerical aperture in the optical waveguide input and output are matched with the single-mode optical fiber, the best Ge components of 0. 03 and 0. The ridge height corresponding to a large cross-section and corresponding to the single-mode fiber core diameter was 4 to 10 μm and 4.0 to 5.9 μm, respectively, and the ridge widths were 8.8 to 10.0 μm and 5.9 to 10.0 μm, respectively.