设计并制作了一种基于马赫-曾德尔干涉仪(MZI)结构的低功耗聚合物热光开关。聚合物材料具有低热导率和高热光系数的优点,可以有效降低热光器件的功耗。在Si O2衬底上,采用热光系数较大的Norland紫外固化胶(NOA73)作为波导芯层,聚甲基丙烯酸甲酯和甲基丙烯酸环氧丙酯的共聚物[P(MMA-GMA)]作为波导的上包层,设计了热光开关器件,并对光场和热场进行了模拟,采用传统的半导体工艺完成了热光开关器件的制备。器件的测试结果表明,在1550 nm工作波长下,热光开关器件的消光比为20.2 d B,驱动功率仅为9.14 m W,开关的上升时间为174μs,下降时间为292μs。 A low power consumption polymer thermo-optic switch based on Mach-Zehnder interferometer (MZI) structure was designed and fabricated. The polymer material has the advantages of low thermal conductivity and high thermal coefficient, which can effectively reduce the power consumption of the thermal optical device. On the Si O2 substrate, Norland UV curable adhesive (NOA73) with larger thermal coefficient was used as waveguide core. The copolymer of PMA and GMA [P (MMA-GMA) ] As the upper cladding of the waveguide, a thermo-optical switching device is designed and the optical field and the thermal field are simulated. The preparation of the thermo-optic switching device is completed by the traditional semiconductor process. The test results show that the extinction ratio of the thermo-optic switch is 20.2 d B at a working wavelength of 1550 nm, the driving power is only 9.14 mW, the rise time of the switch is 174 μs and the fall time is 292 μs.