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介绍了化学气相沉积(CVD)中的传质现象研究的最新进展,从传质方程的建立到边界条件确定都进行了详细的介绍,并举例说明了数值分析的结果对反应器设计与工艺参数的优化的指导作用。
The latest progress of mass transfer phenomenon in chemical vapor deposition (CVD) was introduced. The mass transfer equation was established and the boundary conditions were all described in detail. The results of numerical analysis were given to illustrate the relationship between reactor design and process parameters Optimization of the guiding role.