论文部分内容阅读
表征了新合成的热光聚合物bisphenol A-aldehyde resin(BPA-resin)的独特性质。并且利用光刻和反应离子刻蚀技术(RIE)制备成功BPA-resin聚合物的单模条波导.实验结果表明,对于TE和TM偏振,该聚合物波导在1.31μm和1.55μm波长下分别有低达0.43 dB/cm和0.51 dB/cm的传播损耗.在上述波长下,波导的低偏振相关损耗(PDL)小于0.1 dB/cm.因此,是制备可调热光器件的良好导波模快.
Characterization of the newly synthesized thermophilic polymer bisphenol A-aldehyde resin (BPA-resin) of the unique nature. And the single-mode waveguide of BPA-resin polymer was prepared by photolithography and reactive ion etching (RIE) .The experimental results show that for the TE and TM polarizations, the polymer waveguides have wavelength of 1.31μm and 1.55μm respectively As low as 0.43 dB / cm and a propagation loss of 0.51 dB / cm. At these wavelengths, the waveguide has a low polarization dependent loss (PDL) of less than 0.1 dB / cm and therefore is a good guide for fast tunable thermo-optical devices .