为实现铌酸锂退火质子交换(APE)波导折射率分布的准确计算,选择含苯甲酸锂的苯甲酸缓冲液作为质子交换质子源,高温退火制作了波导样本。针对该工艺过程建立退火质子交换波导模型,包括非线性扩散模块和光学数值仿真模块,分别计算APE波导折射率及其模式有效折射率。以测得的样本波导模式有效折射率和计算的有效折射率差的均方根构建评价函数(FOM),结合遗传算法提取该工艺条件下质子扩散参数,实现了不同交换深度和退火时间波导折射率分布及其光学特性的一体化计算。实验表明:FOM小于0.001,计算折射率分布同IWKB方法测得结果吻合较好,最大偏差约0.002。 In order to accurately calculate the refractive index distribution of APN waveguide, a benzoic acid buffer containing lithium benzoate was selected as the proton exchange proton source, and the waveguide samples were prepared by high temperature annealing. For the process, an annealing proton exchange waveguide model is established, which includes a nonlinear diffusion module and an optical numerical simulation module, and calculates the refractive index and the mode effective refractive index of the APE waveguide respectively. Based on the measured mean square error (RMS) of the waveguide mode effective refractive index and the calculated effective refractive index difference (FOM), genetic algorithm was used to extract the proton diffusion parameters under different processing conditions to achieve different exchange depth and annealing time of waveguide refraction Integrated Calculation of Rate Distribution and Optical Properties. Experiments show that: FOM is less than 0.001, calculated refractive index distribution consistent with the IWKB method measured results agree well, the maximum deviation of about 0.002.