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设计了一种基于绝缘层上硅(SOI)的推挽式硅-有机物混合(SOH)马赫-曾德干涉型(MZI)电光调制器。利用薄膜模式匹配法对槽波导(slot)的光场分布进行了仿真分析,优化后得到了限制因子为0.32的slot波导结构。采用推挽式马赫-曾德干涉仪结构,并在相移臂嵌入LX M1非线性有机材料,得到半波电压-长度积V_π·L为0.885V·mm、电学响应带宽f_(RC)可达123.2GHz、开关速度为8.11ps的SOH调制器结构。利用基于本征有限元法求解麦克斯韦方程,对共平面波导电极系统进行了计算仿真,获得了特性阻抗接近50Ω、高频速率匹配的电极结构。
A push-pull silicon-organic hybrid (SOH) Mach-Zehnder interference (MZI) electro-optic modulator based on silicon on insulator (SOI) was designed. The optical field distribution of the slot waveguide is simulated and analyzed by using the thin film pattern matching method. The optimized slot waveguide structure with the limiting factor of 0.32 is obtained. Using the push-pull Mach-Zehnder interferometer structure, the LX M1 nonlinear organic material is embedded in the phase-shift arm, and the half-wave voltage-length product V_π · L is 0.885V · mm. The electrical response bandwidth f_ (RC) 123.2GHz, 8.11ps switching speed SOH modulator structure. By solving the Maxwell equation based on the intrinsic finite element method, the co-planar waveguide electrode system is simulated and the electrode structure with characteristic impedance close to 50Ω and high frequency rate matching is obtained.