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本文采用CW超声分子束以及时间分辨质谱技术研究在紫外(355nm)和可见(560nm)激光照射下Cl_2和InP(100)表面反应产物的质量分布.同时以调制分子束技术和锁相放大探测方法研究了在表面温度300K-800K范围内Cl_2和Inp(100)热反应产物的质量分布。并测定了主要产物信号InCl~+,InCl_2~+,PCl~+,PCl_2~+,PCl_3~+的信号强度与表面温度的关系,对于反应机理作了讨论.
In this paper, the mass distributions of the reaction products on the surface of Cl_2 and InP (100) under ultraviolet (355nm) and visible (560nm) laser irradiation were studied by using CW ultrasonic molecular beam and time-resolved mass spectrometry. At the same time, The mass distribution of thermal reaction products of Cl_2 and Inp (100) at the surface temperature of 300K-800K was studied. The relationship between signal intensity and surface temperature of the main product signals InCl ~ +, InCl_2 ~ +, PCl ~ +, PCl_2 ~ + and PCl_3 ~ + was also measured. The reaction mechanism was discussed.