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A real-time monitoring system is set up based on a computer, dynamic interferometer, beam expanding system,and a beam reflecting system. The stability and repeatability of the monitoring system is verified. A workpiece and a glass monitoring plate are placed in the same ring. The surface figure of the workpiece, monitored by the monitoring plate, synchronizes with the surface of the glass monitoring plate in terms of peak–valley and power.The influence of the reflection and transmission surface are discussed in theory and a numeral deviation in online and offline testing data is quantitatively analyzed. The new method provides a quick and easy real-time method to characterize changes to the optical surface during polishing.
A real-time monitoring system is set up based on a computer, dynamic interferometer, beam expanding system, and a beam reflecting system. The stability and repeatability of the monitoring system is verified. A workpiece and a glass monitoring plate are placed in the same ring. The surface figure of the workpiece, monitored by the monitoring plate, synchronizes with the surface of the glass monitoring plate in terms of peak-valley and power. The influence of the reflection and transmission surface are discussed in theory and a numeral deviation in online and offline testing data is quantitatively analyzed. The new method provides a quick and easy real-time method to characterize changes to the optical surface during polishing.