报道了利用Ｘ射线双晶衍射法精确测定ＺｎＯＬｉＮｂＯ３质子交换光波导的晶格常数变化。结果表明，波导层内含有均匀分布的三维应变场，晶格常数的变化随着波导取向的不同而呈现各向异性特点。 Reported the use of X-ray double crystal diffraction method for accurate determination of ZnOLiNbO3 proton exchange optical waveguide lattice parameter changes. The results show that the waveguide layer contains a uniformly distributed three-dimensional strain field, and the change of the lattice constant exhibits anisotropy with the orientation of the waveguide.