论文部分内容阅读
本文报道用低压有机金属化合物化学气相淀积(LP-MOCVD)外延生长InGaAsP/InP应变量子阶材料,材料参数与外延条件的关系,量子阱器件的结构设计及其器件应用.用所生长的材料研制出宽接触阈值电流密度小于400A/cm2(腔长400μm),DC-PBH结构阈值7~12mA的1.3μm量子阱激光器和宽接触阈值电流密度小于600A/cm2(腔长400μm),DC-PBH结构阈值9~15mA的1.55μm量子阶激光器以及高功率1.3μm量子阱发光二极管和InGaAsPIN光电探测器.
This paper reports the relationship between epitaxial growth parameters and epitaxial growth of InGaAsP / InP strained materials by LP-MOCVD. The structure design of QW devices and their device applications are reported. A 1.3μm quantum well laser with wide contact threshold current density of less than 400A / cm2 (cavity length of 400μm), DC-PBH structure threshold of 7 ~ 12mA, and wide contact threshold current density of less than 600A / cm2 400μm), a 1.55μm quantum laser with DC-PBH threshold of 9-15mA, high power 1.3μm quantum well LED and InGaAsPIN photodetector.