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讨论在热解碳化学气相沉积过程中出现的多重定态和非平衡相变这一典型的非平衡物理现象的机理和发展趋势 .通过理论分析和实验结果的分析发现热解碳化学气相沉积的化学反应是一个典型的非平衡化学反应 ,其中在沉积过程中出现的生成碳黑的过程是一个典型的非平衡相变 .在这一非平衡化学反应中 ,自由基的反应模型符合Schlogl模型 .在这一非平衡化学反应中 ,有线性区和非线性区 ,线性区的产物是热解碳 ,而非线性区是碳黑 .在线性区 ,反应速率方程是唯一的、线性的 ,而在非线性区 ,反应速率方程是多重的、非线性的 .
The mechanisms and trends of the typical non-equilibrium physical phenomenon of multiple stationary and non-equilibrium phase transitions during pyrolytic carbon chemical vapor deposition are discussed.The theoretical analysis and experimental results show that pyrolysis carbon chemical vapor deposition The chemical reaction is a typical non-equilibrium chemical reaction, in which the formation of carbon black during the deposition process is a typical non-equilibrium phase transition in which the free radical reaction model conforms to the Schlogl model. In this non-equilibrium chemical reaction, there are linear and nonlinear regions, the product of the linear region is pyrolytic carbon, and the non-linear region is carbon black. In the linear region, the reaction rate equation is unique and linear, Nonlinear region, the reaction rate equation is multiple, non-linear.