灵敏度是非制冷热敏二极管型红外焦平面阵列(IRFPA)的一项重要性能指标.二极管结构的电压温度系数(VTC)对灵敏度有很大的影响.分析了二极管结构的设计参数和工艺参数对其电压温度系数的影响,仿真结果表明二极管的串联个数和pn结结面积是两项重要因素.因此,设计出6个串联“阱”形pn结的二极管结构,并对具有该结构的热敏二极管型红外焦平面阵列进行了流片.测试结果表明,在10 μA正向偏置电流下,二极管结构的电压温度系数为8.2 mV/K,单个像素的灵敏度为19.1 μV/K.不同结面积结构的测试结果表明,增加结面积能有效提升二极管结构的电压温度系数和灵敏度.“,”Sensitivity is an important performance index of the thermodiode uncooled infrared focal plane array (IRFPA).The voltage temperature coefficient (VTC) of diode structures has a strong impact on the sensitivity.The influences of the design and process parameters on the VTC of the diode structure were analyzed.The simulation result shows that the number of series diodes and pn junction area are two key factors influencing the VTC.Therefore,the diode structure with six series “well” shape pn junctions was designed.The thermodiode IRFPA with this structure was fabricated.The test results show that under the forward bias current of 10 μA,the VTC of the diode structure is 8.2 mV/K,and the sensitivity of a single pixel is 19.1 μV/K.And the test results of structures with different junction areas show that increasing the junction area can effectively enhance the VTC and sensitivity of the diode structure.