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采用等离子体增强金属有机化合物化学气相沉积（PEMOCVD）工艺制备含铁聚合物薄膜。考察了偏压、源物加热电压对膜的沉积速率及膜中Fe的填充系数的影响。用IR，XPS，TEM和TED对膜的组成和结构进行了分析，表明薄膜具有Fe团簇镶嵌在聚合物基质中的杂混结构特征。对薄膜的光学、电学及湿敏特性进行了研究，证明膜的填充系数对膜的结构和性能都有很大的影响。该薄膜具有较好的湿敏性能。
Preparation of iron-containing polymer films by plasma enhanced metal organic chemical vapor deposition (PEMOCVD) process. The effects of bias voltage and source heating voltage on the deposition rate of film and the filling factor of Fe in the film were investigated. The composition and structure of the films were analyzed by IR, XPS, TEM and TED. The results show that the films have the characteristics of hybrid structure in which Fe clusters are embedded in the polymer matrix. The optical, electrical and hygroscopic properties of the films were investigated. The results show that the filling factor of the films has great influence on the structure and properties of the films. The film has good moisture sensitivity.