Coarsening of cuboidal γ\'precipitates and relevant diffusion process in Ni-based single-crystal superalloy CMSX-4 were investigated at 1000,1020 and 1040 ℃ for specific times.The γ\'coarsening kinetics followed a cubic rate law with time and was presumably controlled by bulk diffusion of elements in γ matrix.The associated diffusion activation energy was experimentally determined to be about 300 kJ/mol when it is considered the temperature-dependent thermo-physical parameters in modified Lifshitz-Slyozov-Wagner theory.The influence of temperature on γ/γ\'microstructure is briefly discussed based on pseudo-binary[Ni]-[Al]phase diagram.Interactions among elements can effectively raise the local vacancy formation and vacancy-atom exchange barriers close to γ-and γ\'-partitioning elements,respectively.Thus,it can significantly reduce the inter-coupling migrations of atoms during the macroscopic cross-diffusion process associated with γ\'coarsening of Ni-based superalloys.