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研制了一种基于MEMS(微机电系统)技术的固体化学微推进器。给出了推进器的结构设计、工艺流程,以及推进剂加注方法。建立了推进器点火过程热传导模型,利用该模型分析了不同因素对点火延迟时间的影响。同时,通过建立推进器性能模型,进行了推进单元推力和冲量的预测,给出了仿真结果。结果表明:减小点火电阻衬底材料的密度、热导率和比热可以减小点火延迟时间和点火功率;在一定条件下,增大喷管出口与喉部面积比能够提高推进器真空推力和冲量;MEMS在推进系统中的应用,能够满足微小型卫星对星载推进系统小型化、微推力、高精度的要求。
Developed a solid-state chemical micro-thruster based on MEMS (Micro-Electro-Mechanical System) technology. The structure design, process flow and propellant filling method are given. The heat conduction model of the propeller ignition process was established, and the influence of different factors on the ignition delay time was analyzed. At the same time, through the establishment of the propeller performance model, the propulsion unit thrust and impulse are predicted, and the simulation results are given. The results show that reducing the density, thermal conductivity and specific heat of the ignition resistor substrate can reduce the ignition delay time and ignition power. Under certain conditions, increasing the ratio of the nozzle outlet to the throat area can improve the propeller vacuum thrust And impulse; The application of MEMS in the propulsion system can meet the requirements of miniaturization, micro-thrust and high-precision of the spaceborne propulsion system by the micro-satellite.