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介绍了集成电路失效率抽样检查的基础理论,论述集成电路标准规范中最常用的LTPD方案,并对LTPD抽样方案中的抽样样本大小进行了计算。
The basic theory of sampling failure of integrated circuit failure rate is introduced. The most commonly used LTPD scheme in integrated circuit standard specification is discussed. The size of sampling sample in LTPD sampling scheme is calculated.