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提出了一种基于微分干涉原理的光学形貌仪。由于采用共光路干涉体系,仪器对机械振动、空气扰动以及温度变化等外界干扰不敏感,并且不需标准参考反射镜。实践结果表明,光学形貌仪的横向分辨率为0.5μm,在不采取任何隔振和环境控制措施的一般场合下,形貌仪具有优于1nm的垂直分辨率和重复测量精度。
An optical profilometer based on the principle of differential interference is proposed. Due to the common optical path interference system, the instrument is not sensitive to external disturbances such as mechanical vibration, air disturbance and temperature change, and does not require a standard reference mirror. The practical results show that the lateral resolution of the optical profilometer is 0.5μm, and the profilometer has a better vertical resolution and repeatability than 1nm without any vibration isolation and environmental control measures.