亚波长周期结构光栅具有传统光栅所不具有的特殊特性。基于矢量衍射理论-耦合波分析法对矩形亚波长光栅的衍射效率进行了理论计算,针对光通信中的1 550nm波长设计了一种基于SOI衬底的亚波长偏振光栅,分析了光栅周期、光栅深度、占空比和光栅结构的变化对其偏振特性的影响。仿真结果表明,当光栅的周期为960nm,槽深为230nm,占空比为24%时,可使TM模式的透射率大于95%,TE模式的透射率小于5%,且矩形的光栅结构相对于三角形和圆形的光栅结构具有更好的偏振性能,可有效用于光开关、光隔离器、激光器、光探测器等半导体光电子器件。 Subwavelength periodic structure grating has the special characteristic that the traditional grating does not have. Based on vector diffraction theory and coupled wave analysis, the diffraction efficiency of rectangular sub-wavelength grating is theoretically calculated. A subwavelength polarizing grating based on SOI substrate is designed for the wavelength of 1 550 nm in optical communication. The grating period, grating Effects of depth, duty cycle and grating structure on their polarization characteristics. The simulation results show that the transmission of TM mode is more than 95% and the TE mode is less than 5% when the grating period is 960nm, the groove depth is 230nm and the duty cycle is 24%. The rectangular grating structure is relatively The triangular and circular grating structure has better polarization performance and can be effectively used in semiconductor optoelectronic devices such as optical switches, optical isolators, lasers, and photodetectors.