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本文研究了用充氩放电管进行直流二极溅射LaB_6薄膜,对薄膜作了表面分析YPS及X衍射分析,并测定了它的逸出功。从而可以肯定所获得的薄膜材料确系LaB_6,并得出了LaB_6以化学计量比溅射的结论。
In this paper, the LaB_6 thin film was DC sputtered by Argon discharge tube. The surface of the LaB_6 thin film was analyzed by YPS and X-ray diffraction. The work function was also measured. It is certain that the obtained thin film material is indeed LaB_6, and concludes that LaB_6 is sputtered in a stoichiometric ratio.