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采用射频磁控溅射法在石英玻璃衬底上制备了ZnO:Mn薄膜,结合N~+注入获得Mn-N共掺ZnO薄膜,进而研究了退火温度对其结构及室温铁磁性的影响.结果表明,退火后ZnO:(Mn,N)薄膜中Mn~(2+)和N~(3-)均处于ZnO晶格位,没有杂质相生成.退火温度的升高有助于修复N~+注入引起的晶格损伤,同时也会让N逸出薄膜,导致受主(No)浓度降低.室温铁磁性存在于ZnO:(Mn,N)薄膜中,其强弱受No浓度的影响,铁磁性起源可采用束缚磁极化子模型进行解释.
ZnO: Mn thin films were prepared on quartz glass substrates by radio frequency magnetron sputtering, and Mn-N codoped ZnO thin films were obtained by N + implantation. The effects of annealing temperature on the structure and room temperature ferromagnetism were also studied. Results The results show that Mn2 + and N3- are all in the ZnO crystal lattice and there is no impurity phase in the ZnO: (Mn, N) film after anneal.The increase of annealing temperature is helpful to repair the N ~ + Implantation caused by lattice damage, but also let N escape the film, resulting in reduced concentration (No) at room temperature ferromagnetism exists in the ZnO: (Mn, N) film, its strength by the No concentration, iron The magnetic origin can be explained by the bounding magnetic polarization sub-model.