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通过对微型触觉传感器敏感单元的理论和有限元（ＦＥＭ）分析的对比，得出了Ｅ型方膜结构类型传感器的静态特性（变形、应力等）和动态特性（固有频率、振型等）。并讨论了静态和动态特性对结构的敏感性，为传感器的优化设计提供依据
The static characteristics (deformation, stress, etc.) and dynamic characteristics (natural frequency, mode shape, etc.) of E-type square-membrane structure sensors are obtained by comparing the theory and finite element analysis of the sensitive elements of the micro-tactile sensor. The sensitivity of the static and dynamic characteristics to the structure is discussed, which provides the basis for the optimal design of the sensor