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在概略地考察了潘宁室和磁控管系统中的放电型式以后,论述了一种潘宁放电的型式。在潘宁放电的整个放电过程中,存在着电子和离子的环流,并且假设压强在10-4乇以下时,放电过程中主要是产生电子。由此出发,计算了磁控管型吸附离子泵的电子流、离子流和灵敏度。将计算值与其它作者的实验结果进行了比较,发现因子最多相差5。但是,计算所显示的趋势与实验所得的结果是相似的。考虑到这种简化模型存在着固有的不精确性,因此,可以认为这种假设可能是正确的。
After a brief review of the discharge patterns in the Penning chamber and the magnetron system, a version of the Penning discharge was discussed. During Penning's discharge, there is a circulation of electrons and ions, and it is assumed that electrons are mainly generated during the discharge at a pressure of 10-4 Torr or less. Based on this, the electron flow, ion current and sensitivity of the magnetron adsorption ion pump were calculated. Comparing the calculated values with the experimental results of other authors, it is found that the factors differ by up to 5. However, the trends shown in the calculations are similar to those obtained experimentally. Given the inherent inaccuracies of this simplified model, this assumption can be assumed to be correct.