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采用溶胶-凝胶法在玻璃基片上制备了纯ZnO薄膜和高浓度Cu掺杂的Co,Cu共掺ZnO(Zn0.90CoxCu0.1-xO,x=0.01,0.03,0.05)薄膜。扫描电镜观察到无论是纯ZnO还是掺杂ZnO薄膜表面都有均匀分布的颗粒,但是在Cu含量较高时均匀性更好。X射线衍射揭示所有样品都具有纤锌矿结构,但是Cu掺杂量的增加使晶格常数略有减小,而晶粒尺寸却略有增大。XPS测试结果表明样品中Co离子的价态为+2价和+3价,Cu离子的价态为+2价和+1价共存。室温光致发光测量在所有样品中均观察到较强的紫外发光峰、蓝光双峰和较弱的绿光发光峰。
Pure ZnO thin films and high-concentration Cu-doped Co and Cu codoped ZnO (Zn0.90CoxCu0.1-xO, x = 0.01,0.03,0.05) thin films were prepared on glass substrate by sol-gel method. Scanning electron microscopy showed that both pure ZnO and doped ZnO films had uniformly distributed particles, but the uniformity was better when the content of Cu was higher. X-ray diffraction revealed that all the samples had wurtzite structure, but the increase of Cu doping reduced the lattice constant slightly and the grain size slightly increased. The results of XPS showed that the valences of Co ions in samples were +2 valences and +3 valences, and the valences of Cu ions were +2 valences and +1 valences. Room temperature photoluminescence measurements Strong UV, blue and weak green luminescence peaks were observed in all samples.