【摘 要】
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A novel direct writing technique using submicron-diameter fibers is presented. This technique adopts contact mode in the process of writing, and submicron lines with different widths have been obtained. Experimental results demonstrate that the resolution
【机 构】
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StateKeyLaboratoryofModernOpticalInstrumentation,DepartmentofOpticalEngineering,ZhejiangUniversity,H
【出 处】
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ChineseOpticsLetters
论文部分内容阅读
A novel direct writing technique using submicron-diameter fibers is presented. This technique adopts contact mode in the process of writing, and submicron lines with different widths have been obtained. Experimental results demonstrate that the resolution of this technique can be smaller than the exposure wavelength of 442 nm, and 380-nm-wide line is achieved. In addition, the distribution of light fields in the photoresist layer is analyzed by finite-difference time-domain method.
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