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采用溶胶-凝胶法,通过调整氯化锂和氯化铜的摩尔比在不同基片上制备了不同Li-Cu共掺杂浓度的ZnO薄膜。利用X射线衍射仪、扫描电子显微镜、透射电子显微镜、紫外可见光分光光度计和伏安特性测试等表征了薄膜的结晶状况、表面形貌及光电特性。结果表明:所得Li-Cu共掺杂ZnO薄膜为六角纤锌矿多晶结构,有CuO杂质相生成。随Li和Cu摩尔比增加,共掺杂ZnO薄膜结晶度增强,晶粒长大,样品表面不平整度增加。CuO颗粒的出现,使得共掺杂ZnO薄膜透射率降低,透光性较差。Li与Cu摩尔比为1:1时,共掺杂ZnO薄膜的综合导电性最好。
The ZnO thin films with different Li-Cu co-doping concentrations were prepared on different substrates by adjusting the molar ratio of lithium chloride to copper chloride by sol-gel method. The crystallinity, surface morphology and photoelectric properties of the films were characterized by X-ray diffraction, scanning electron microscopy, transmission electron microscopy, UV-visible spectrophotometer and voltammetry. The results show that the obtained Li-Cu co-doped ZnO thin film is hexagonal wurtzite polycrystalline structure with CuO impurity phase. With the increase of molar ratio of Li to Cu, the crystallinity of co-doped ZnO films increases, the grains grow up and the surface roughness increases. The appearance of CuO particles makes the transmittance of co-doped ZnO thin films decrease and the light transmittance is poor. When the molar ratio of Li to Cu is 1: 1, the co-doped ZnO thin film has the best overall conductivity.