本文所讨论的复合板筒镜电子能量分析器,和通用的筒镜分析器一样,具有二级聚焦和传输率高的优点.其主要特点是:当一次入射束垂直入射于试样表面,激发出的次生电子以喷泉状通过弯曲的轨道绕过试样,重新会聚到试样背后的对称轴上.因此,在用于电子枪位于分析器外的扫描俄歇电子显微镜中作俄歇电子能谱仪时,可以缩短电磁物镜的工作距离,减小物镜的球差系数,增加一次电子束流密度,从而提高俄歇分析的灵敏度.其次,与电子枪在内筒中的简镜分析器相比,可以简化内筒的结构,并便于电子枪的调整. As discussed in this paper, the electronic energy analyzer of the composite plate cylinder mirror has the advantages of two-stage focusing and high transmission rate, like the general cylinder analyzer, and its main features are as follows: When an incident beam is incident perpendicularly on the surface of the sample and excited The resulting secondary electrons fountain around the specimen in a curved orbit and re-converge on the axis of symmetry behind the specimen.Thus, Auger-Huggie’s can be used in a scanning Auger electron microscope for electron guns located outside the analyzer When the spectrometer is used, the working distance of the electromagnetic objective lens can be shortened, the spherical aberration coefficient of the objective lens can be reduced, and the electron beam current density can be increased once again, thereby improving the sensitivity of the Auger analysis.Secondly, compared with the simple mirror analyzer of the electron gun in the inner cylinder, The structure of the inner cylinder can be simplified and the adjustment of the electron gun can be facilitated.