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超精密加工过程存在的加工误差影响着器件的面形误差,进而影响光学性能。制造者往往从面形精度方面来评价加工精度,但是光学性能才是光学系统的最终评价指标,仅仅关注加工过程中加工误差对单个面的面形误差影响是不够的,加工误差对系统光学性能的影响需要进一步研究。基于多体系统理论和光线追迹理论建立了加工误差影响分析模型,探索了加工误差对面形误差和光学性能的影响,得出了系统主要的面形误差形式及其对系统调制传递函数(MTF)的影响关系,并根据系统对光学性能的要求得出了加工误差、面形误差和角度公差,从而找到了影响三反系统光学性能的重点加工误差,研究结果可为离轴三反系统加工误差的控制及光学质量可控制造的实现提供理论指导。
The machining errors that exist in the ultra-precision machining process affect the surface profile error of the device, thereby affecting the optical performance. However, the optical performance is the ultimate evaluation index of the optical system. It is not enough to focus solely on the influence of the processing error on the surface profile error of a single face during the processing. The processing error has no effect on the optical performance of the system The impact needs further study. Based on multi-body system theory and ray tracing theory, a model of machining error influence analysis was established, and the influence of machining error on surface shape error and optical performance was explored. The main form of surface error and its effect on system modulation transfer function (MTF ), And according to the requirements of the system for optical performance, machining errors, surface shape errors and angular tolerances are obtained, so as to find the key machining errors that affect the optical performance of the triple reaction system. The research results can be processed for the off-axis tri-inverted system Error control and optical quality control can be realized to provide theoretical guidance.